CCU-010 HV high vacuum coating system
Swiss CCU-010 HV Turbomolecular Pumped Coaters
The CCU-010 HV high compact vacuum coating system is designed for the highest demands in the field of sample preparation.
The CCU-010 HV have three configuration versions:
1. CCU-010 HV_SP-010/SP-011 automatic sputtering coater, the high vacuum capabilities of the CCU-010 HV make the SP-010 unit ideal for applications using both oxidising (e.g. Cr, Ir, W, ITO etc.) and non-oxidising (e.g. Au, Au/Pd, Pt etc.) metals sputtering. The SP-011 sputter unit is designed for high power sputtering and for a broad range of coating materials, such as C, Ni, DLC etc.
2. CCU-010 HV_CT-010 automatic carbon evaporation coater, it sets new standards for fully automated benchtop carbon coating with an impressive high vacuum performance that ensures high quality coating for high resolution SEM and TEM applications, including carbon coating of replicas.
3. CCU-010 HV_SP010+CT-010 Combined Sputter Coater and Carbon Coater, the high vacuum capabilities of both sputtering and carbon coating, the deposition heads can be swapped in seconds.
Application high vacuum
The CCU-010 high vacuum sputter and carbon coater was designed for the highest demands in the field of sample preparation. Premium components and a smart design allow excellent results in ultra-high-resolution applications. Our device is a compact, fully automatic sputter coater and/or carbon coater. The CCU-010 HV base unit pumping system is totally oil-free and includes a high performance turbo pump and diaphragm backing pump, both internally located, giving the coater a very small footprint (no cumbersome rotary pump and vacuum lines). It is a mini sputter coater size wise with big potential. The use of an oil-free, pumping system reduces contamination or defects in the coating to a minimum. The device can be kept under vacuum when switched off. This efficiently protects the system from dust and humidity and creates a fast pumping speed and proper vacuum conditions for high-quality coatings.
A smart device
A sputter coater and/or carbon coater with options for plasma treatment within one device? Yes, this is possible with our table top coating system. By simply changing the process head, you can easily configure the unit for all these applications. Adjust the unit to your requirements or extend the functionality afterwards. A coating thickness monitor close to the sample is standard fitting which will precisely monitor and control film thickness of carbon and metal films.
Do not waste time
The use of high-quality materials and components in combination with innovative ideas produces extraordinarily short process times. Create recipes via the modern user interface and use the automatic mode for reliable and reproducible production of thin coatings.
Low Consumption
The efficient gas control optimized for high vacuum reduces the consumption of your process gas. With high target utilization, you save money on consumables.
Compact and Practical
Save valuable laboratory space thanks to small dimensions. Weight has been minimized to reduce transport costs. Standardised small-flange quick connections interface with your existing connections.
Easy Start-up and Servicing
Unpack, connect, start! Do away with high start-up costs. The plug-and-play concept allows you to start up the device yourself. You only need to connect the power supply and the process gas. The service technician can run a quick error analysis thanks to the integrated usb service interface. The modular set-up allows for the targeted replacement of defective components.
SP-010 Sputter Head
The sputter head SP-010 is an intelligent, compact sputter head for fine-grained sputtering.
SP-011 Sputter Head
The sputter head SP-011 is an intelligent magnetron sputter head allowing high sputtering rates for an extensive range of sputtering materials.
CT-010 Carbon Thread Head
The carbon thread head CT-010 is an intelligent head, unrolling for automatic carbon thread transport in the vacuum, a self-contained plug-in-style carbon thread evaporation head module delivers high quality carbon films with unsurpassed ease of use and servicing. Together with the CCU-010 HV base unit it builds a fully automated carbon coater. Safematic sets new standards in laboratory carbon coating with this compact carbon thread head. The CT-010 carbon coater module can precisely control carbon film thickness and terminate evaporation at user-defined thicknesses. The process uses the on-board quartz film thickness measurement system in combination with pulsed evaporation to track the increase in carbon film thickness and then adjust the evaporation current as it nears the user-defined thickness, typically in the range of 2-15nm for TEM applications.
ET-010 Etching Unit
For specimen pre-treatment or after-treatment combined with a coating process the etching unit allows to apply plasma to the substrates. With this accessory one can select Argon, extra etching gas or environmental air either as process gas. This allows cleaning of the samples prior to a coating and increasing the adhesion of thin films. Additionally it would be possible to modify the surface properties of a coated sample by a plasma treatment after the coating. With air plasma it is possible to turn a thin carbon layer from hydrophobic to hydrophilic for example.
GD-010 Glow Discharge
This is an option of the carbon thread head CT-010. The optional GD-010 glow discharge system can quickly be installed for surface treatment by air, argon or by other dedicated gas plasma. For example, it is possible to make carbon films hydrophilic. This is greatly simplified because the carbon coating and glow discharge treatment can be done sequentially – without the inconvenience of having to "break" vacuum conditions and exchange process heads. This unit installed into CT-010 is compatible with all sample stages.
STAGES & TABLES
The standard stage is included in base unit and is connected to the tilt and height adjustable table of the CCU-010. The table contains two slots for the quartz sensor (center position for normal use and edge position for larger samples). Options: ST-010 Slides Stage, RS-010 Rotary Table, PS-006 Planetary Gear Table, PS-006 Rotary Support, etc.
HS-010 Head Storage
The new vacuum storage box allows you to keep the second coating head for your CCU-010 and the full range of targets always clean and ready for use. Use one system for both metal and carbon coating. One additional glass tube and a second stage plate completely eliminate the problem of cross contamination between metal and carbon deposition. This allows you to use one system for both metal and carbon coating.
PC Software Coating LAB
The Windows software allows you to visualise process pressure, current, voltage, coating rate, coating thickness and sample temperature as real-time curves.
Transport Case
Very robust transport case with wheels and space for various accessories.
ET-010R Retrofit Plasma Cleaning Unit
You already have a low or high vacuum basic unit and would like to add the etching unit? No problem! The plasma treatment unit can be used in combination with the sputter head and/or the carbon thread head.
Consumbales & Spare Parts
Are you looking for consumables and spare parts? Look through our wide product range and you will find what you need. Please contact with Tansi(Hotline: 025-85432178,85432278; 010-62908712).
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