Autosamdri-815, Series B Critical Point Dryer

The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and the team of long-standing associates within the tousimis® SAMDRI design group. Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" (25mm) wafers. 1) Process up to 1" (25mm) wafers. 2) Automatic Supercritical Point Dryer. 3) Minimal Facility Utility Requirements. 4) Made in U.S.A.

Product model:

Autosamdri-815, Series B

Product description

Parameters

Autosamdri®-815, Series B Critical Point Dryer

The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and the team of long-standing associates within the tousimis® SAMDRI design group. Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" (25mm) wafers.

Process up to 1" (25mm) wafers
Automatic Supercritical Point Dryer
Minimal Facility Utility Requirements
Made in U.S.A.

FEATURES

Microprocessor* controller allows for complete automatic processing.
Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
Internal surfaces inert to CO2, ultra pure alcohols and acetone.
Repeatable operating parameters insuring reproducibility of results.
Process up to 5 x 10mm square die or 5 x 1" (25mm) diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders* are used to transport and process your MEMS devices minimizing handling).
Integrated temperature controls.*
Internal rupture disc built in for safety.
LED's instantly indicate process mode at a glance.*
Clean room static-free compatible design.
Complete advanced solid state reliable electronics.
Efficient adiabatic cooling system*; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
All electronic components meet CE, UL and/or U.S. Military Specifications.
Static pressure control module pre-set for automatic safe pressure stability.
0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
Under-lit chamber with viewing window facilitates operator chamber status viewing.
Vernier Handle Meter Valves allow for repeatable precision flow control.
SOTER™ Condenser* connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).

OPTIONAL ACCESSORIES

8777: SOTER™ CONDENSER
8760-01: KNURL NUT for 1.25" Process Chamber
8760-40: 5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
8770-10: CHAMBER LAMP, 120Volt/60Hz
8770-32: HIGH-PRESSURE HOSE, 5ft
8770-33: HIGH-PRESSURE HOSE, 10ft
8770-50: CHAMBER LID, for any tousimis SAMDRI® with a 1.25" diameter chambers
8785: Double T-Filter Assembly
8770-83B: 0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
8784-05: Gasket for LCO2 Tank Connect
8770-51/T: Teflon® O-Ring for 1.25" Chamber I.D.
8770-45: Flow Meter - Use with any 1.25" dia. Samdri® Chamber (20 SCFH)
8770-53: POWER CABLE
8770-54: LCO₂ TANK SCALE W/ REMOTE DISPLAY
8770-56: Step-Down Transformer, 200-240V → 110-120V, 1000W
8770-83A: Internal 0.5µm 316SS Particulate Line Filter
8768G: 1" - 25mm HF Compatible Wafer Holder, Holds 5 Wafers
8768E: 10mm Square HF Compatible Chip Holder, Holds 5 Die