Automegasamdri-915B, Series B Critical Point Dryer

Smooth operation and precise control are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6" (150mm), 4" (100mm), 3" (75mm), 2" (50mm) wafers or 10mm square die per process run! 1) Process up to 6" (150mm) wafers 2) Automatic Supercritical Point Dryer 3) Minimal Facility Utility Requirements 4) Made in U.S.A.

Product model:

Automegasamdri-915B, Series B

Product description

Parameters

Automegasamdri-915B, Series B Critical Point Dryer

The Supercritical Automegasamdri®-915B, Series B System was developed by Dr. A. J. Tousimis and the team of long-standing associates within the tousimis® SAMDRI design group. Smooth operation and precise control are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6" (150mm), 4" (100mm), 3" (75mm), 2" (50mm) wafers or 10mm square die per process run!

Process up to 6" (150mm) wafers
Automatic Supercritical Point Dryer
Minimal Facility Utility Requirements
Made in U.S.A.

FEATURES

Clean room static-free compatible design.
Microprocessor controller allows for complete automatic processing.*
All internal surfaces are inert to CO2 and ultra pure alcohols.*
Repeatable operating parameters insuring reproducibility of results.*
LED's instantly indicate process mode at a glance.*
Integrated temperature controls.*
Processes up to 5 x 6" (150mm) diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 4" (100mm), 5 x 3" (75mm), 5 x 2" (50mm) diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
All electronic components meet CE, UL and/or U.S. Military Specifications.
Internal rupture disc built in for safety.*
Static pressure control module pre-set for automatic safe pressure stability.
An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes, maintains temperature automatically during both FILL and PURGE modes.*
For added safety and convenience, U.S. Patented SOTER™ Condenser* quietly captures exhaust and alcohols.
Under-lit chamber with viewing window facilitates operator chamber status viewing.
0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.*
Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.

OPTIONAL ACCESSORIES

8760-02: KNURL NUT for 4" and 6" Process Chamber
8760-40: 5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
8770-10: CHAMBER LAMP, 120Volt/60Hz
8770-32: HIGH-PRESSURE HOSE, 5ft
8770-33: HIGH-PRESSURE HOSE, 10ft
8770-70: CHAMBER LID for 6" Process Chamber
8785: Double T-Filter Assembly
8770-83B: 0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
8784-05: Gasket for LCO2 Tank Connect
8770-51T/915B: O-Ring for Automegasamdri®-936 and Automegasamdri®-915B
8770-47: Flow Meter - Use with Automegasamdri®-936 and Automegasamdri®-915B (100 SCFH)
8770-53: POWER CABLE
8770-54: LCO₂ TANK SCALE W/ REMOTE DISPLAY
8770-56A: Step-Down Transformer, 200-240V → 110-120V, 3000W
8770-83A: Internal 0.5µm 316SS Particulate Line Filter
8768A: 6" - 150mm HF Compatible Wafer Holder, Holds 5 Wafers
8768F: 5" - 125mm HF Compatible Wafer Holder, Holds 5 Wafers
8768B: 4" - 100mm HF Compatible Wafer Holder, Holds 5 Wafers
8768C: 3" - 75mm HF Compatible Wafer Holder, Holds 5 Wafers
8768D: 2" - 50mm HF Compatible Wafer Holder, Holds 5 Wafers
8768G: 1" - 25mm HF Compatible Wafer Holder, Holds 5 Wafers
8768E: 10mm Square HF Compatible Chip Holder, Holds 5 Die