Automegasamdri-936 Supercritical Point Dryer, TOUCHSCREEN SERIES C

The New Supercritical Automegasamdri®-936 CPD System,TOUCHSCREEN SERIES C, the classic features you have come to expect for decades that enable smooth operation, precise control and reproducibility are again evident in Tousimis's most current design! Process up to Five 6" (150mm) Wafers per Process Run

Product model:

Automegasamdri-936

Product description

Parameters

Automegasamdri®-936 CPD, TOUCHSCREEN SERIES C

The New Supercritical Automegasamdri®-936 System was developed by Tousimis design team whose goal was to listen to and incorporate your needs into their next generation. The classic features you have come to expect for decades that enable smooth operation, precise control and reproducibility are again evident in Tousimis's most current design!

Tousimis are a specialist, manufacturer of critical point dryers for electron microscopy with proud history going back over 50 years. Automegasamdri®-936 System is a fully automatic, digitally controlled critical point dryer with precision process control. It features intuitive touch screen control, allowing the user to enter preferred process recipes – or select from preinstalled factory defaults. Tousimis’s Stasis software gives the operator complete range control – especially useful for more challenging specimens. There is a full range of specimen holders designed to meet most requirements.The process chamber has purge stirring to ensure complete fluid interchange.

Process up to Five 6" (150mm) Wafers per Process Run
Touchscreen Programmable Interface
Run Data Review
Integrated Chiller Loop Decreases LCO2 Consumption
Easy Facilitation with Small Foot Print Design

FEATURES

A dedicated initial Slow Fill into the process chamber allows ideal fluid dynamics preserving the most sensitive micro devices.
Maintenance made easy via accessible components including the external Post-Purge-Filter assembly.
Patent Pending "Vortex Swirl": Non-mechanical stirring chamber allowing for fluid dynamic exchange without the need for particle generating friction causing devices.
Extremely Efficient integrated Closed Cooling Loop dropping chamber temperature quickly for shorter process run times.
The internal SOTER(tm) condenser quietly captures and separates CO2 exhaust and waste alcohols.
Our original Chamber Inserts enable chamber I.D. variance of chamber I.D. maximizing efficiency in LCO2 consumption, process time, and providing multiple size wafer process capability!
Process chamber LCO2 filtration down to 0.08µm with 99.999%+ particle retention.
Processes up to five 6" (150mm) wafers each run. Included are the following HF Compatible Wafer Holders: 6" (150mm), 4" (100mm), 3"(75mm), 2" (50mm) and 10mm Die Holders.
Chamber Illumination via viewing window facilitates chamber status visualization.
Automatic process with factory default recipe or the ability to customize your own!
All internal surfaces are inert to CO2 and ultrapure alcohols.
Repeatable operating parameters insuring "reproducibility" of results.
Safety operation features integrated into both temperature and pressure automatic regulation.
All electronic components meet CE, UL and/or U.S. Military Specifications.
Clean room static-free compatible design.

OPTIONAL ACCESSORIES

8760-02: KNURL NUT for 4" and 6" Process Chamber
8760-41: 3 AMP FUSE for Autosamdri®, Automegasamdri® and Touchscreen Series C
8760-42: 8 AMP FUSE for Autosamdri®, Automegasamdri® and Touchscreen Series C
8770-13: LED CHAMBER LAMP, 120V
8770-32: HIGH-PRESSURE HOSE, 5ft
8770-33: HIGH-PRESSURE HOSE, 10ft
8770-70: CHAMBER LID for 6" Process Chamber
8785: Double T-Filter Assembly
8770-83B: 0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
8784-05: Gasket for LCO2 Tank Connect
8770-51T/916B: O-Ring for AutomegaSamdri®-938 and AutomegaSamdri®-916B
8770-47: Flow Meter - Use with Automegasamdri®-936 and Automegasamdri®-915B (100 SCFH)
8770-54: LCO₂ TANK SCALE W/ REMOTE DISPLAY
8768A: 6" - 150mm HF Compatible Wafer Holder, Holds 5 Wafers
8768F: 5" - 125mm HF Compatible Wafer Holder, Holds 5 Wafers
8768B: 4" - 100mm HF Compatible Wafer Holder, Holds 5 Wafers
8768C: 3" - 75mm HF Compatible Wafer Holder, Holds 5 Wafers
8768D: 2" - 50mm HF Compatible Wafer Holder, Holds 5 Wafers
8768G: 1" - 25mm HF Compatible Wafer Holder, Holds 5 Wafers
8768E: 10mm Square HF Compatible Chip Holder, Holds 5 Die