Selection Guide for Quorum Sputter Coaters and SEM/ TEM Carbon Coaters
The Q Plus Series is the latest version of Quorum's internationally acclaimed, market-leading range of sputter and carbon coaters. They are increasingly used in high-resolution microscopy, where ultra-fine coating is a must.
Sputter coating is the standard method for preparing non-conducting or poorly conducting specimens prior to observation in a scanning electron microscope (SEM). Quorum offer low-cost, rotary-pumped sputter coaters for depositing non-oxidising metals - such as gold (Au) and platinum (Pt) - and turbomolecular-pumped coaters, suitable for both oxidising and non-oxidising metals, such as chromium (Cr).
To offer improved ultra-fine coating Quorum have introduced the NEW Q150V Plus, which offers an ultimate vacuum of 1 x 10-6mbar for superior results.
Large chamber sputter coaters are available for specimens up to 200 mm in diameter. Most Quorum coaters can also be configured for carbon evaporation using easy-change carbon rod and carbon fibre inserts.
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Coaters for EM and thin film applications - a quick overview
The Q150V Plus is suitable for high-vacuum applications. This new product offers users the capability to produce finer grain size and thinner coating for ultra-high-resolution applications (above x 200k magnification).
The Q150T Plus coater is suitable for SEM, TEM and many thin film applications. It is available in three formats: as a sputter coater, carbon coater or both sputtering and carbon evaporation in a single compact system.
The rotary-pumped Q150R Plus coater is suitable for W-SEM sputtering applications using non-oxidising metals and for carbon coating SEM specimens for EDS and WDS.
For larger specimens, the Q300T T Plus (turbomolecular-pumped) models allow coating of a single large diameter specimen up to 8"/200 mm (e.g. a wafer), or multiple smaller specimens over a similar diameter. Both have triple sputtering heads to ensure even coating deposition.
For thin film applications the Q300T D Plus Dual Target Sequential Sputter Coater allows consecutive metal layers to be sputtered without the need to break vacuum.
The Q150 GB is a modular version of the Q150T ES coater designed to be integrated into a glove box.
Completing the range is the SC7620, a compact, entry-level SEM sputter coater which is available with an optional carbon fibre evaporation attachment.
Bench-Top Vacuum Evaporators
Thermal evaporation under high vacuum is an established method of depositing thin layers of metals and carbon. Typical applications include the production of support films and specimen replicas for transmission electron microscopy (TEM) and many thin-film applications. The K975X Turbo-Pumped Thermal Evaporator is a large chamber system with comes as standard with a carbon rod gun and a metal filament/boat source.
Based on the successful Q Series of sputter/carbon coaters, the Q300T ES is a large chamber, turbomolecular-pumped coating system ideally suited to metal evaporation onto large diameter specimens or smaller multiple specimens. The Q300T ES also comes with interchangeable sputtering and carbon evaporation inserts.
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