Q300T T Plus - triple target sputter coater for specimens up to 200mm diameter

The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8"/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens. The Q300T T Plus uses easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidising and noble metals. Fitted with three 57mm Ø x 0.3 mm chromium (Cr) sputtering targets as standard. Other targets options include; Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al etc.

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Product description

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The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8"/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens. The Q300T T Plus uses easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidising and noble metals. Fitted with three 57mm Ø x 0.3 mm chromium (Cr) sputtering targets as standard. Other targets options include; Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al etc.

NB: Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head - for sequential coating see the Q300T D Plus. The other coaters are also available in a large chamber system，see: Q300T ES Plus, and can also see the K975X/K975S.

Key features

• Ultimate vacuum of 5 x 10^-5mbar or less possible

• New touch and swipe capacitive screen

• USB port for upgrades and download of process log files

• Multiple-use profiles can be set up on one machine

• New software sorts recipes per user according to recent use

• 16GB of memory can store more than 1000 recipes

• New multi-colour LED visual status indicator

• Interchangeable stage options

• Three sputter heads for larger area deposition of same materials

Recommended applications

• Wafer Inspection

• Multiple sample preparation for SEM

These products are for Research Use Only.

The Q300T T Plus is part of Quorum Technologies internationally acclaimed Q series of coaters, used by thousands of customers worldwide. Designed to provide high-quality coating solutions for SEM, TEM and thin-film applications, the Q series is versatile, affordable and easy to use.

The Q Plus Series is also available in a smaller chamber format，see: Q150R Plus, Q150T Plus, Q150V Plus, and can also see the SC7620 and Q150GB.

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