Q300T ES Plus - large chamber, turbomolecular-pumped coating system
Based on the successful Q Series of sputter/carbon coaters, the Q300T ES Plus is a large chamber, turbomolecular-pumped coating system ideally suited to metal evaporation onto large diameter specimens or smaller multiple specimens. The Q300T ES also comes with interchangeable sputtering and carbon evaporation inserts.
Q300T ES Plus combined sputtering, metal evaporation and carbon coating system with large work chamber. The deposition heads can be swapped in seconds and the intelligent system logic automatically recognises which head is in place and displays the appropriate operating settings. Consists of high resolution turbomolecular pumped capacitive touch-screen controled sputter coater with status LED indicator, including quick release sputter insert and one 57mm diameter x 0.1 mm chromium target, and high vacuum carbon rod/metal evaporation coater, including quick-release metal evaporation head. Coating inserts are interchangeable. wafer stage, 50mm diameter, supplied as standard. Full range gauge assembly for high vacuum measurement.
The other coaters are also available in a large chamber system，see: Q300T T Plus, Q300T D Plus, and can also see the K975X/K975S.
Key features
• Capable of achieving vacuum of 5 x 10-5 mbar
• New touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one machine
• New software sorts recipes per user according to recent use
• 16GB of memory can store more than 1000 recipes
• New multi-colour LED visual status indicator
• Interchangeable stage options
• Combined sputtering, metal evaporation and carbon coating system
• Full range gauge assembly
Recommended applications
• Ideal for metal evaporation onto large diameter specimens or smaller multiple specimens
• High-resolution magnification SEM
• Carbon coating for EDX, WDS, EBSD analysis
These products are for Research Use Only.
The Q300T ES Plus is part of Quorum Technologies internationally acclaimed Q series of coaters, used by thousands of customers worldwide. Designed to provide high-quality coating solutions for SEM, TEM and thin-film applications, the Q series is versatile, affordable and easy to use.
The Q Plus Series is also available in a smaller chamber format，see: Q150R Plus, Q150T Plus, Q150V Plus, and can also see the SC7620 and Q150GB.
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