K850WM Large Chamber Critical Point Dryer
The K850WM is a compact, bench-top instrument designed to critical point dry a complete 6"/150 mm wafer. A convenient wafer holder allows rapid transfer and ensures that pre-drying does not occur.
Key features
• Large diameter chamber - optimised for wafer/MEMS drying
• Vertical chamber with top-loading and bottom draining - ensures specimens do not become uncovered during drying
• Thermoelectric heating - accurate temperature control
• Fine control needle valve pressure let down - precise control
• Temperature monitoring and control with thermal cut-out protection
• Pressure monitoring with safety cut-out for over pressure
The K850WM has built-in heating and water cooling using the Recirculating Heater/Chiller. This combination will give temperature control of cooling and heating. This ensures the critical point is accurately obtained and avoids excess pressures and temperatures or the need to rely on pressure relief valves to control pressure during the heating cycle.
The K850WM has a vertical chamber which allows top-loading of the specimen (e.g. single wafer). A viewing port in the top plate allows observation of the chamber and wafer during the critical point drying process. The exchange mechanism is simple to use and ensures the specimen remains under liquid during loading.
The wafers are held in a PTFE holding tray. The tray including wafer is immersed in acetone in order to remove all moisture from the specimen. After dehydration, the wafer and holder are transferred into the pre-cooled specimen chamber using the wafer transfer device. On completion of the critical point drying process, the wafer is removed from the chamber using the transfer device prior to further processing.
Our CPD product range included the E3100 critical point dryer with larger, horizontal chamber, and the K850 critical point dryer with vertical chamber. We also offer two EM freeze dryers, the K750X freeze dryer uses peltier cooling and operates under rotary-pumped vacuum. For more demanding applications, the K775X freeze dryer is cooled by liquid nitrogen and uses turbomolecular pumping. These drying products are for Research Use Only.
Nanjing Tansi Technology Co.,Ltd.
TEL： 025-85432178， 025-85432278
FAX：025-83353938
ZIP： 210009
ADD：2-728b, Hongqiao center, new City Plaza, 281 Zhongshan North Road, Nanjing
E-mail：sales@tansi.com.cn
Tansi Beijing Office
TEL： 010-62908712
FAX：025-83353938
ZIP： 100085
ADD：No.15, information road, Haidian District, Beijing
E-mail：sales@tansi.com.cn
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