Multipurpose Chamber——TEM & SEM sample cleaning & storage solution
The multipurpose chamber can be configured for different applications with exter-nal accessories such as EM-KLEEN remote plasma source and/or TEM specimen holder adapters. EM-KLEEN remote plasma source can be used to generate oxygen & hydrogen radicals using air, O2, or H2 gas for sample cleaning and surface activa-tion. If the chamber is equipped with TEM specimen holder adapters, it can accept a total of six TEM specimen holders from Thermo-Fisher, JEOL, and Hitachi. Then it can be used as a vacuum storage station. Of course, EM-KLEEN plasma source can also be taken out and installed on a separate SEM, FIB or XPS chambers.
Configuration 1
EM-KLEEN plasma source on the multipurpose chamber.
Applications: EM-KLEEN remote plasma source generates oxygen or hydrogen radicals using room air, oxygen, or Hydrogen as the process gas. Sample can be loaded from the top glass door. EM-KLEEN plasma source can also be taken out and installed on a separate SEM, FIB & XPS system chamber for chamber clean-ing.
Configuration 2
EM-KLEEN plasma source and TEM specimen holder adapter on the multipurpose chamber.
Applications: EM-KLEEN remote plasma source for SEM & TEM sample cleaning. Sample can be loaded through the top glass door or inserted through the TEM specimen holder. EM-KLEEN plasma source can also be taken out and installed on a SEM, FIB & XPS system for chamber cleaning. Chamber can be pumped by oil-free dry scroll pump or turbo pump station.
Configuration 3
TEM specimen holder adapters installed on the chamber as the specimen & holder vacuum storage chamber. The chamber can be pumped by an oil-free dry scroll pump or a turbopump station. Support a total of six TEM specimen holders. It can be config-ured to support JEOL, Hitachi & Thermo-Fisher TEM specimen holders.
TEM specimen holder vacuum pumping station
TEM specimen holder storage can store up to six TEM specimen holders under the vacuum condition to help the sample and holder outgas, remove water condensation, and keep the specimen and the holder clean. It can also be used for leak check on the specimen holders.
Key Features:
• Total six storage cells per unit.
• Each storage cell can be indivudually pumped or vented using solenoid valves. The remaining cells can still be kept under the vacuum when one of the holders is taken out.
• Multiple storage systems can be chain linked to share a same vacuum pump. It can also share the same vacuum pump with the Tergeo-EM system.
• It can be pumped by an oil-free dry scroll pump or by a turbo pump station.
• The vacuum pump is separated from the storage station, easy to maintain and service the pump if necessary.
• All metal tubes under the vacuum to minimize the outgas, thus reduce the contamination.
• The stabilized operation temperature is slightly higher the room temperature, which helps the specimen holder outgas faster.
PIE Ltd is a leader in modern plasma cleaning technology. Its products include: Tergeo series desktop plasma cleaners (Tergeo, Tergeo-Plus and Tergeo-EM), Remote plasma cleaners (EM-KLEEN, SEMI-KLEEN quartz and SEMI-KLEEN sapphire). If you need, please contact us.
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